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The purpose of this document is to provide a specification for dichlorosilane (SiH2Cl2) used in the semiconductor industry
to be used for the equipment control in flow shop type manufacturing line
5-1104 (technical revision)
• Unit Object Definition
This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17
C00300 - SEMI C3 - Specification for Gases StdTpc-Automated Material Handling Systems The purpose of this documentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 2, 2017. Available at www. semiviews. org and www. semi. org in March 2017; originally published in 1981; previously published April 2013. Recognizing the importance of impurity content of gases in the manufacture of semiconductors, suppliers responded by introducing